Dependences of Plasma Parameters on Dilution Gas Content in Inductively Coupled C2F6/Ar and C2F6/O2Discharges
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Published:2005-12-08
Issue:12
Volume:44
Page:8667-8669
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Kimura Takashi,Noto Masahisa
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering