Author:
Mikami Hidenori,Hatayama Tomoaki,Yano Hiroshi,Uraoka Yukiharu,Fuyuki Takashi
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
4 articles.
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1. Harsh Environment Materials;Reference Module in Materials Science and Materials Engineering;2016
2. Device Processing of Silicon Carbide;Fundamentals of Silicon Carbide Technology;2014-09-26
3. Harsh Environment Materials;Comprehensive Microsystems;2008
4. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications;Journal of Physics D: Applied Physics;2007-10-21