Vibrational Spectroscopic Study of the Interface of SiO2/Si(100) Fabricated by Highly Concentrated Ozone: Direct Evidence for Less Strained Si–O

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Vibrational Spectroscopic Study of the Interface of SiO2/Si(100) Fabricated by Highly Concentrated Ozone: Direct Evidence for Less Strained Si–O–Si Bond Angle

Published:2005-10-11 Issue:10 Volume:44 Page:7602-7604
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Nakamura Ken,Ichimura Shingo

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Nanoscale SiOx Tunnel Oxide Deposition Techniques and Their Influence on Cell Parameters of TOPCon Solar Cells;Transactions on Electrical and Electronic Materials;2021-07-30

3. Mechanistic study of the atomic layer deposition of scandium oxide films using Sc(MeCp)2(Me2pz) and ozone;Journal of Vacuum Science & Technology A;2019-01

4. Surface-induced reversible addition-fragmentation chain-transfer (RAFT) polymerization on magnetic nanoparticles to resist nonspecific adsorption of proteins;Chemical Engineering Journal;2011-10

5. Effect of N2O Flow Rate on Reliability of SiOxFilms Deposited by SiH4–N2O Gas Mixture Plasma;Japanese Journal of Applied Physics;2009-08-20

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