Observations of Lattice Distortions near Silicon Surfaces Implanted with Low-Energy Nitrogen Ions by Reflection X-ray Topography
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Published:2005-08-05
Issue:8
Volume:44
Page:6277-6282
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Futagami Koji,Fukumori Taichiro,Tsukuda Noboru,Kuroki Kiyohiro
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering