Evaluation of Performance of Proximity Effect Correction in Electron Projection Lithography
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Published:2005-07-26
Issue:7B
Volume:44
Page:5535-5539
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Osawa Morimi,Ogino Kozo,Hoshino Hiromi,Machida Yasuhide,Koba Fumihiro,Yamashita Hiroshi,Arimoto Hiroshi
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering