Stress Control and Ferroelectric Properties of Lead Zirconate Titanate (PZT) Thin Film on Si Substrate with Buffer Layers
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Composition control and introduction of an Fe2O3 seed layer in metalorganic chemical vapor deposition of epitaxial BiFeO3 thin films;Japanese Journal of Applied Physics;2019-04-01
2. Large Local-Compressive Stress-Induced Improvements in Piezoelectric Characteristics of Lead Zirconate Titanate Thin Films on a Ni Nanodots Array;Advanced Electronic Materials;2018-05-31
3. Growth and magnetic properties of spin coated Co0.6Zn0.4Mn0.3Fe1.7O4 ultrathin films on silicon (100), (110) and (111) substrates;Journal of Materials Science: Materials in Electronics;2017-11-18
4. Enhanced dielectric and ferroelectric properties of PZT thin films derived by an ethylene glycol modified sol–gel method;Journal of Sol-Gel Science and Technology;2017-02-04
5. Preparation and piezoelectric properties of self-polarized (Na,Bi)TiO3–BaTiO3thin films on Si substrate;Japanese Journal of Applied Physics;2014-09-01
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