Effects of Wafer Precleaning and Plasma Irradiation to Wafer Surfaces on Plasma-Assisted Surface-Activated Direct Bonding
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference20 articles.
1. Room temperature 16 μm electroluminescence from Ge light emitting diode on Si substrate
2. Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects
3. 42 GHz pin Germanium photodetector integrated in a silicon-on-insulator waveguide
4. High-speed optical modulation based on carrier depletion in a silicon waveguide
5. Low V_pp, ultralow-energy, compact, high-speed silicon electro-optic modulator
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