Gas Adsorption Properties of Fluorocarbon Thin Films Prepared Using Three Different Types of RF Magnetron Sputtering Systems
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference21 articles.
1. Ion-beam etching and sputtering of polytetrafluoroethylene (PTFE)
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3. The properties of films prepared by the rf sputtering of PTFE and plasma polymerization of some freons
4. X-Ray Photoelectron Spectroscopy of Fluorocarbon Films Deposited by RF Sputtering
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Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Optical characteristics of poly(tetrafluoroethylene) thin film prepared by a vacuum evaporation;Japanese Journal of Applied Physics;2016-01-06
2. Adsorption Properties of an Organic Thin Film Prepared by an R.F. Sputtering with a Poly(Ethylene Terephthalate) (PET) Target for Volatile Organic Compounds (VOCs);IEEJ Transactions on Sensors and Micromachines;2014
3. Functional Fluorocarbon Thin Films Prepared by an R.F. Sputtering;Journal of The Surface Finishing Society of Japan;2013
4. A Survey of the 2010 Quartz Crystal Microbalance Literature;Journal of Molecular Recognition;2012-08-16
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