Novel Three-Dimensional Positioner and Scanner for the STM Using Shear Deformation of Piezoceramic Plates-Reference-Cited by-同舟云学术

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Novel Three-Dimensional Positioner and Scanner for the STM Using Shear Deformation of Piezoceramic Plates

Published:1988-01-20 Issue:Part 2, No. 1 Volume:27 Page:L123-L126
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Uozumi Kiyohiko,Nakamoto Keiichi,Fujioka Kageaki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. A Precise Magnetic Walking Mechanism;IEEE Transactions on Robotics;2014-12

3. Wear Reduction Method for Frictionally Fast Feeding Piezoactuator;Japanese Journal of Applied Physics;2006-02-08

4. Highly Reliable Piezoelectric Actuator for Precision Stage System;Japanese Journal of Applied Physics;2005-05-10

5. A Control Method of Ultrasonic Actuator-Driven Precision Stages Based on Stick-Slip Compensation and Continuous-Path Tracking;IEEJ Transactions on Industry Applications;2005

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