Synthesis and Thermal Conductivity Measurement of High-Integrity Ultrathin Oxygen-Implanted Buried Oxide Layers
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Published:2004-04-27
Issue:4B
Volume:43
Page:2185-2187
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Dong Yemin,Chen Jing,Chen Meng,Wang Xi,He Ping,Tian Lilin,Liu Litian,Li Zhijian
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering