Real-Time Growth Control of Ge–Sb–Te Multilayer Film as Optical Recording Media byIn SituEllipsometry
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Published:2004-09-09
Issue:9A
Volume:43
Page:6329-6334
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
An Sung Hyuck,Kim Jong Hyouk,Li Xuezhe,Kim Sang Jun,Kim Sang Youl
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering