Dot Array Microoptics for Lighting Panel Using Synchrotron Radiation Lithography
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline;Journal of Vacuum Science & Technology B;2023-10-11
2. Fabrication of Tapered Micropillars with High Aspect-Ratio Based on Deep X-ray Lithography;Materials;2019-06-26
3. Deep X-ray lithography system with a uniform and high-accuracy fabrication area established in beamline BL11 at NewSUBARU;Journal of Synchrotron Radiation;2019-02-06
4. Innovative Exposure Techniques for 3D Microfabrication;LIGA and Its Applications;2008-11-26
5. Proposal of next-generation three-dimensional X-ray lithography and its application to fabrication of a high-luminescence optical waveguide for a liquid crystal backlight unit;Electrical Engineering in Japan;2008
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