Evaluation of Mask Soaking Performance in a Thermally Stabilized Vacuum Chamber in an Electron Beam Mask Writer
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Published:2004-06-29
Issue:6B
Volume:43
Page:3734-3738
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Mitsui Soichiro,Akeno Kiminobu,Ogasawara Munehiro,Tojo Toru
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering