Calculations of Phase Shift and Reflectivity for Phase Shifting Masks Employing Multi-Layer Films
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Published:1992-11-15
Issue:Part 1, No. 11
Volume:31
Page:3584-3588
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering