Evaluation of a Pre-Objective Scan System for the Laser Recrystallization of Silicon on Insulator Material
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Published:1992-08-15
Issue:Part 1, No. 8
Volume:31
Page:2631-2639
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Willems Geert,Maes Herman
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering