Comparison of Film Properties between Hydrogenated and Unhydrogenated Diamond-Like Carbon Films Prepared by Radio-Frequency Magnetron Sputtering
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference52 articles.
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4. Mass Density as Basis Parameter on Mechanical Properties under Diamond-Like Carbon Prepared in Wide Range of Conditions Using Variety of Methods;Japanese Journal of Applied Physics;2011-01-20
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