Smoothing of Diamond-Turned Copper Surfaces Using Ion Beams with Aid of Planarizing Film-Reference-Cited by-同舟云学术

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Smoothing of Diamond-Turned Copper Surfaces Using Ion Beams with Aid of Planarizing Film

Published:2007-09-07 Issue:9A Volume:46 Page:6071-6073
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Frost Frank,Takino Hideo,Fechner Renate,Schindler Axel,Ohi Namiko,Nomura Kazushi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference16 articles.

1. Ion polishing of copper: some observations

2. Efficacy of ion polishing optical surfaces

3. Planarization of patterned surfaces by ion beam erosion

4. Ion polishing with the aid of a planarizing film

5. Smoothing of chemically vapour deposited diamond films by ion beam irradiation

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterization of a broad beam Kaufman-type ion source operated with CHF3 and O2;Journal of Vacuum Science & Technology A;2023-07-18

2. Development of morphable polishing tools with labyrinth and dimple textures;Journal of Materials Processing Technology;2022-05

3. Ion Beam Figuring and Smoothing;Low-Energy Ion Irradiation of Materials;2022

4. Improved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaces;Journal of Astronomical Telescopes, Instruments, and Systems;2018-11-13

5. Improved ion beam tools for ultra-precision figure correction of curved aluminium mirror surfaces;Optical Fabrication, Testing, and Metrology VI;2018-06-15

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