n-Type Control by Sulfur Ion Implantation in Homoepitaxial Diamond Films Grown by Chemical Vapor Deposition-Reference-Cited by-同舟云学术

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n-Type Control by Sulfur Ion Implantation in Homoepitaxial Diamond Films Grown by Chemical Vapor Deposition

Published:1999-12-15 Issue:Part 2, No. 12B Volume:38 Page:L1519-L1522
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hasegawa Masataka,Takeuchi Daisuke,Yamanaka Sadanori,Ogura Masahiko,Watanabe Hideyuki,Kobayashi Naoto,Okushi Hideyo,Kajimura Koji

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

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