Two-Dimensional Self-Consistent Simulation of a DC Magnetron Discharge-Reference-Cited by-同舟云学术

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Two-Dimensional Self-Consistent Simulation of a DC Magnetron Discharge

Published:1999-04-15 Issue:Part 1, No. 4A Volume:38 Page:2131-2136
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Shidoji Eiji,Ohtake Hiroto,Nakano Nobuhiko,Makabe Toshiaki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 62 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Physics and applications of dusty plasmas: The Perspectives 2023;Physics of Plasmas;2023-12-01

2. Particle-in-Cell Simulations for the Improvement of the Target Erosion Uniformity by the Permanent Magnet Configuration of DC Magnetron Sputtering Systems;Coatings;2023-04-07

3. High-efficient particle-in-cell/Monte Carlo model for complex solution domain andsimulation of anode layer ion source;Acta Physica Sinica;2023

4. Artificial Neural Networks to Predict Sheet Resistance of Indium-Doped Zinc Oxide Thin Films Deposited via Plasma Deposition;Coatings;2022-02-09

5. Working principle and layout logic of closed magnetic field in sputtering;Acta Physica Sinica;2022

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