Separation of Thin GaN from Sapphire by Laser Lift-Off Technique
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference19 articles.
1. Optical patterning of GaN films
2. Pulsed Excimer Laser Processing of AlN/GaN Thin Films
3. Optical Process for Liftoff of Group III-Nitride Films
4. Laser-Processing for Patterned and Free-Standing Nitride Films
5. Damage-free separation of GaN thin films from sapphire substrates
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