Multilayer Thin-Film Capacitor Fabricated by Radio-Frequency Magnetron Sputtering
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference21 articles.
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1. Fabrication of piezoelectric multilayer thin-film actuators;Microsystem Technologies;2016-02-09
2. Multilayer La-modified PbTiO3 capacitors via RF magnetron sputtering;Journal of Materials Science;2015-02-27
3. High Piezoelectric Longitudinal Coefficients in Sol-gel PZT Thin Film Multilayers;Journal of the American Ceramic Society;2014-03-17
4. Growth and characterization of Ag/n-ZnO/p-Si/Al heterojunction diode by sol–gel spin technique;Journal of Alloys and Compounds;2013-02
5. Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O$_{3}$ Thin Films for Micro-Electromechanical Systems;Japanese Journal of Applied Physics;2012-09-20
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