Propagation Reactions and Structures of Hydrogenated Amorphous Silicon Depending on Plasma Sources with Different Excitation Frequencies
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Published:2000-10-15
Issue:Part 1, No. 10
Volume:39
Page:5767-5772
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Azuma Masanobu,Shimizu Isamu
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering