Phase-Modulation Optical Spatial Filters Applicable to Inspection Systems for Patterned Silicon Wafers
-
Published:2000-02-15
Issue:Part 1, No. 2A
Volume:39
Page:490-495
-
ISSN:0021-4922
-
Container-title:Japanese Journal of Applied Physics
-
language:en
-
Short-container-title:Jpn. J. Appl. Phys.
Author:
Yamamoto Naoko,Iwata Mitsuhiro,Minakata Ryoji
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering