In-Situ Transmission Electron Microscopy and Electron Energy Loss Spectroscopy Observation of TiN Grown by N-Implantation
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Published:2000-07-30
Issue:Part 1, No. 7B
Volume:39
Page:4395-4399
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Kasukabe Yoshitaka,Tani Hiromitsu,Abe Hiroaki,Yamada Yukio
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering