Author:
Fukushima Kimitake,Saya Daisuke,Kawakatsu Hideki
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
22 articles.
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1. Tribological Aspects of in Situ Manipulation of Nanostructures Inside Scanning Electron Microscope;NanoScience and Technology;2024
2. An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization;Beilstein Journal of Nanotechnology;2020-08-26
3. Atomic force microscope integrated into a scanning electron microscope for fabrication and metrology at the nanometer scale;Photomask Technology 2019;2019-09-26
4. Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2018-03
5. Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11