Author:
Bearda Twan,Mertens Paul W.,Heyns Marc M.,Schmolke Rüdiger
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
2 articles.
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1. Impact of nitrogen doping on gate oxide integrity on 300 mm silicon wafers after RTP in hydrogen ambient;10th IEEE International Conference of Advanced Thermal Processing of Semiconductors
2. Modeling of substrate related extrinsic oxide failure distributions;2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320)