Study of Optimization Guidelines on Nitrogen Concentration in Nitrided Oxide for Logic and Dynamic Random Access Memory Application
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Published:2000-04-30
Issue:Part 1, No. 4B
Volume:39
Page:2203-2207
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Jung Jong-Wan,Park Sung-Kye,Yoon Gyu-Han,Kang Dae-Kwan,Lee Youngjong
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering