A 100-kV, 100-A/cm2Electron Optical System for the EB-X3 X-Ray Mask Writer
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Published:2000-12-30
Issue:Part 1, No. 12B
Volume:39
Page:6849-6853
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Saito Kenichi,Kato Junichi,Matsuda Tadahito,Nakayama Yoshinori
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering