Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
30 articles.
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1. Hydrogen atom kinetics in capacitively coupled plasmas;Plasma Sources Science and Technology;2017-04-05
2. Radical-controlled plasma processing for nanofabrication;Journal of Physics D: Applied Physics;2011-04-14
3. Production and Detection of H Atoms and Vibrationally Excited H2 Molecules in CVD Processes;Chemical Vapor Deposition;2010-12
4. High performance of compact radical monitoring probe in H2/N2 mixture plasma;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-03
5. Preparation Methods;Carbon Nanowalls;2010