Surface and Interface Study of Titanium Nitride on Si Substrate Produced by Dynamic Ion Beam Mixing Method-Reference-Cited by-同舟云学术

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Surface and Interface Study of Titanium Nitride on Si Substrate Produced by Dynamic Ion Beam Mixing Method

Published:1994-04-15 Issue:Part 1, No. 4A Volume:33 Page:2025-2030
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Beag Young Whoan,Tarutani Masayoshi,Min Kyung-youl,Kiuchi Masato,Shimizu Ryuichi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reducing focused ion beam damage to transmission electron microscopy samples;Journal of Electron Microscopy;2004-10-01

2. Surface smoothening and compaction of silica glass under dynamic negative ion mixing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-04

3. Accumulation Effect of Bombarding N2+Ions in Al for Crystal Growth of AlN Film;Japanese Journal of Applied Physics;2000-05-15

4. Development of ion and electron dual focused beam apparatus for high spatial resolution three-dimensional microanalysis of solid materials;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-07

5. Implanted gallium-ion concentrations of focused-ion-beam prepared cross sections;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-07

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