Evaluation of a Solid State Detector for X-Ray Lithography Dosimetry
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Published:1994-12-30
Issue:Part 1, No. 12B
Volume:33
Page:6905-6907
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Wells Gregory M.,Anderson Paul D.,Leonard Quinn J.,Cerrina Franco,Waldo Whit G.,Yamazaki Kuniaki
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering