New Large Angle Tilt Implanted Drain Structure: Surface Counter-Doped-Lightly Doped Drain for High Hot Carrier Reliability
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Published:1994-07-15
Issue:Part 1, No. 7A
Volume:33
Page:3864-3872
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Chou Jih Wen,Chang Chun Yun,Huang Chimoon,Ho Lien Tse,Ko Joe,Hsue Peter
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering