Growth and Characterization of Zinc Oxynitride Thin Films by Reactive Gas-Timing RF Magnetron Sputtering
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference11 articles.
1. Transparent and conducting ZnO(:Al) films deposited by simultaneous RF- and DC-excitation of a magnetron
2. Preferred orientation and piezoelectricity in sputtered ZnO films
3. Optical properties of zinc oxynitride thin films
4. Deposition and electrical properties of N–In codopedp-type ZnO films by ultrasonic spray pyrolysis
5. Identification of nitrogen chemical states in N-doped ZnO via x-ray photoelectron spectroscopy
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1. Characterisation of Zinc Oxynitride Thin Films Prepared Using Zinc(II) Complex of Hexamethylenetetramine as the Precursor;Materials Sciences and Applications;2022
2. Texture orientation of silver thin films grown via gas-timing radio frequency magnetron sputtering and their SERS activity;RSC Advances;2016
3. Study of Structural Properties of N-Doped ZnO Thin Film Prepared by Reactive Gas-Timing RF Magnetron Sputtering;Advanced Materials Research;2015-12
4. Growth and surface characterization of magnetron sputtered zinc nitride thin films;Thin Solid Films;2012-10
5. Control of N/N2 species ratio in NO plasma for p-type doping of ZnO;Journal of Applied Physics;2011-09
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