Grain Size Effect on Nanopattern Formability in Direct Imprint
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference11 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Reflective polarizer based on a stacked double-layer subwavelength metal grating structure fabricated using nanoimprint lithography
3. Observation and measurement of grain rotation and plastic strain in nanostructured metal thin films
4. Nanoindention studies of DC sputtered Cu and Cu/Cr thin films
5. Indentation size effects in crystalline materials: A law for strain gradient plasticity
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1. Method for Al thin film surface nanostructuring using Al imprinting and anodic oxidation: Application to a high capacitance density metal-insulator-metal capacitor;Thin Solid Films;2017-01
2. Direct Al-Imprinting Method for Increased Effective Electrode Area in MIM Capacitors;IEEE Transactions on Electron Devices;2016-02
3. Finite element method investigation into nanoimprinting of aluminum/polyimide bi-layer substrates;Microelectronic Engineering;2010-11
4. Direct imprint of Al foil for metallization of high-aspect ratio Al lines in nano/micro patterned SiO2/Si;Microelectronic Engineering;2009-04
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