Chemical Structural Analysis of Diamondlike Carbon Films with Different Electrical Resistivities by X-ray Photoelectron Spectroscopy-Reference-Cited by-同舟云学术

Chemical Structural Analysis of Diamondlike Carbon Films with Different Electrical Resistivities by X-ray Photoelectron Spectroscopy

Published:2008-05-16 Issue:5 Volume:47 Page:3376-3379
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Takabayashi Susumu,Okamoto Keishi,Shimada Kenya,Motomitsu Kunihiko,Motoyama Hiroaki,Nakatani Tatsuyuki,Sakaue Hiroyuki,Suzuki Hitoshi,Takahagi Takayuki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference53 articles.

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4. Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films

5. Hydrogen-free amorphous carbon films: correlation between growth conditions and properties

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