Scratch Nanolithography on Si Surface Using Scanning Probe Microscopy: Influence of Scanning Parameters on Groove Size
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference15 articles.
1. Submicrometer modification of polymer surfaces with a surface force microscope
2. Machining Oxide Thin Films with an Atomic Force Microscope: Pattern and Object Formation on the Nanometer Scale
3. Control of the magnetic domain wall propagation in Pt/Co/Pt ultra thin films using direct mechanical AFM lithography
4. Effects of AFM-based nanomachining process on aluminum surface
5. Nanostructure patterns written in III–V semiconductors by an atomic force microscope
Cited by 44 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Thickness measurement of thin films using atomic force microscopy based scratching;Surface Topography: Metrology and Properties;2024-06-01
2. Development of in situ characterization techniques in molecular beam epitaxy;Journal of Semiconductors;2024-03-01
3. Alignment of semiconducting liquid crystalline polymers induced by hot stylus rubbing;Japanese Journal of Applied Physics;2024-03-01
4. Investigation of the Effects of Pulse-Atomic Force Nanolithography Parameters on 2.5D Nanostructures’ Morphology;Nanomaterials;2022-12-11
5. Pile-Ups Formation in AFM-Based Nanolithography: Morpho-Mechanical Characterization and Removal Strategies;Micromachines;2022-11-15
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3