A Cylindrical Micro-Ultrasonic Motor Using Micromachined Bulk Piezoelectric Vibrator with Glass Case-Reference-Cited by-同舟云学术

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A Cylindrical Micro-Ultrasonic Motor Using Micromachined Bulk Piezoelectric Vibrator with Glass Case

Published:2006-05-25 Issue:5B Volume:45 Page:4764-4769
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Kanda Takefumi,Makino Akira,Oomori Yoshitaka,Suzumori Koichi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Evaluation of transducer for cryogenic actuators by equivalent circuit model;Japanese Journal of Applied Physics;2024-02-07

2. A Cylinder-Type Multimodal Traveling Wave Piezoelectric Actuator;Applied Sciences;2020-04-01

3. A study on temperature dependence of an ultrasonic motor for cryogenic environment;Japanese Journal of Applied Physics;2015-06-22

4. Resonant-Type Smooth Impact Drive Mechanism Actuator Operating at Lower Input Voltages;Japanese Journal of Applied Physics;2013-07-01

5. Single-Phase Drive Ultrasonic Linear Motor Using a Linked Twin Square Plate Vibrator;Japanese Journal of Applied Physics;2013-07-01

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