Comparison of Young's Modulus Dependency on Beam Accelerating Voltage between Electron-Beam- and Focused Ion-Beam-Induced Chemical Vapor Deposition Pillars-Reference-Cited by-同舟云学术

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Comparison of Young's Modulus Dependency on Beam Accelerating Voltage between Electron-Beam- and Focused Ion-Beam-Induced Chemical Vapor Deposition Pillars

Published:2006-06-20 Issue:6B Volume:45 Page:5556-5559
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Okada Satoshi,Mukawa Takahito,Kobayashi Ryota,Ishida Masahiko,Ochiai Yukinori,Kaito Takashi,Matsui Shinji,Fujita Jun-ichi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

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