Growth of Fluorocarbon Macromolecules in the Gas Phase: II. The Growth Mechanisms of Large Positive Ions Observed in the Downstream Region of Ar/CF4Plasmas
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mass spectrometric investigation of high-mass neutral species in the downstream region of Ar/CH4 plasmas;Journal of Applied Physics;2011-07
2. Nano-graphite formation enhanced by fluorine in gas phase of carbon sputtering plasmas;TENCON 2010 - 2010 IEEE Region 10 Conference;2010-11
3. Growth of fluorocarbon macromolecules in the gas phase: IV. Li+-attachment mass spectrometric investigation of high-mass neutral radicals in the downstream region of Ar/c-C4F8plasmas;Journal of Physics D: Applied Physics;2009-03-02
4. Mass spectrometric investigation and formation mechanisms of high-mass species in the downstream region of Ar/CF4/O2plasmas;Phys. Chem. Chem. Phys.;2009
5. Influence of substrate type on surface structure of polymeric perfluorocarbon in the initial stage of deposition in Ar/c-C4F8 plasmas;Thin Solid Films;2008-07
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