Dry Oxidation Study on CVD-SiO2/Thermal-SiO2/Si Structure
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Published:1989-12-20
Issue:Part 2, No. 12
Volume:28
Page:L2294-L2296
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Kuroda Shigeki,Nishi Kenji,Ueda Jun
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering