Effect of Light Soaking Temperature on the Metastable Defect Distribution in Magnetron Sputtered Hydrogenated Amorphous Silicon Films
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Published:1989-10-20
Issue:Part 2, No. 10
Volume:28
Page:L1704-L1707
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Bandyopadhyay A. K.,Banerjee Ratnabali,Batabyal A. K.,Barua A. K.,Okushi Hideyo,Tanaka Kazunobu
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering