Stress and Piezoelectric Tuning of Silicon’s Optical Properties

Author:

Tsia Kevin,Fathpour Sasan,Jalali Bahram

Publisher

CRC Press

Reference36 articles.

1. T. Ghani, M. Armstrong, C. Auth et al., A 90 nm high volume manufacturing logic technology featuring novel 45 nm gate length strained silicon CMOS transistors, IEEE International Electron Devices Meeting, 2003 Technical Digest, pp.11.6.1-11.6.3, 2003.

2. Piezoelectric Transducers and Applications

3. Fundamentals of Photonics

4. Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides

5. V. Raghunathan and B. Jalali, Stress-induced phase matching in silicon waveguides, Conference of Lasers and Electro-Optics (CLEO), Long Beach, CA (2006) Paper CMK5.

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