Metrology Data Management and Information Systems-Reference-Cited by-同舟云学术

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Metrology Data Management and Information Systems

Published:2001-06-29 Issue: Volume: Page:
ISSN:
Container-title:Handbook of Silicon Semiconductor Metrology
language:
Short-container-title:

Author:

Tobin Kenneth,Neiberg Leonard

Publisher

CRC Press

Link

http://www.crcnetbase.com/doi/pdf/10.1201/9780203904541.ch23

Reference12 articles.

1. (. @ 0ankaran,M ;eber, J; Tobin, Hr., 5 Bakhani. Inspection in 0e3iconductor Manufacturin,ebsterCs >nc6clopedia of >lectrical and >lectronic >n,ineerin, @ol. !0. New ork# ;ile6, pp 2)2D2"2, !$$$.

2. !0. 0-unnin,ha3, H0 .ostas. 0e3iconductor 6ield i3prove3ent results and best practices. I>>> Transactions 0e3iconductor Manufacturin, '829#!0: !$$(.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Gabor filtering for feature extraction on complex images: application to defect detection on semiconductors;The Imaging Science Journal;2006-12

2. Content based segmentation of patterned wafers;Journal of Electronic Imaging;2004-07-01

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