Author:
Cowan William,Bright Victor
Reference25 articles.
1. D. A. Koester, R. Mahadevan, and K. W. Markus, ``Multi-user MEMS processes (MUMPs): introduction and design rules, rev. 4,'' Technical Report, MCNC MEMS Technical Applications Center, 3021 Cornwallis Road, Research Triangle Park, NC 27709,1996.
2. W. D. Cowan, V. M. Bright, A. A. Elvin, and D. A. Koester, ``Modeling of stressinduced curvature in surface-micromachined devices,'' inMicrolithography and Metrology in Micromachining III, Proc. SPIE, vol.3225, pp.56-67, September 1997.
3. W. D. Cowan, V. M. Bright, M. K. Lee, J. H. Comtois, and M. A. Michalicek, ``Design and testing of polysilicon surface-micromachined piston micromirror arrays,'' inSpatial Light Modulators, Proc. SPIE, vol.3292, pp.60-70, 1998.
4. R. D. Nasby, J. J. Sniegowski, J. H. Smith, S. Montague, C. C. Baron, W. P. Eaton, P. J. McWhorter, D. L. Heatherington, C. A. Apblett, and J. G. Fleming, ``Application of chemical-mechanical polishing to planarization of surface micromachined devices,'' in Technical Digest of the Solid-State Sensor and Actuator Workshop, pp. 48-53, Hilton Head, SC, June 1996.
5. W. D. Cowan and V. M. Bright, ``Thermally actuated piston micromirror arrays,'' inOptical Scanning Systems: Design and Applications, Proc. SPIE, vol.3131, pp.260-271, July 1998.
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