Author:
Vyklicky Libor,Huang Wu-Song,Popova Irene,Varanasi Pushkara Rao,Cameron James,Amara Johan,Sung Jin Wuk,Valeri David,Prokopowicz Greg,Ware Adam,O'Connell Kathleen,Desisto Jason,Vohra Vaishali,O'Shea Kevin,Barclay George,Yamamoto Yoshihiro,Kurihara Tomoki,Hidano Manabu
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference18 articles.
1. [1] X. Shao, et al., Symp. VLSI Technol. (2008) 44.
2. [2] T. Schram, et al.; Symp. VLSI Technol., (2008) 44.
3. [3] T. Bailey, et al., Proc. SPIE, 6924 (2008) 69244F.
4. [4] H.-R. Lee, et al., Proc. SPIE, 7273 (2009) 72730Y.
5. [5] T. Bailey, et al., Proc. SPIE, 6519 (2007) 65190S.
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