Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field-Reference-Cited by-同舟云学术

Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field

Published:2020-07-01 Issue:1 Volume:33 Page:37-44
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Kouge Kouichiro¹,Nagai Shinji¹,Hori Tsukasa¹,Ueno Yoshifumi¹,Yanagida Tatsuya¹,Miyao Kenichi¹,Hayashi Hideyuki¹,Watanabe Yukio¹,Abe Tamotsu¹,Nakarai Hiroaki¹,Saito Takashi¹,Mizoguchi Hakaru¹

Affiliation:

1. Gigaphoton Inc.

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

https://www.jstage.jst.go.jp/article/photopolymer/33/1/33_37/_pdf

Reference26 articles.

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4. 4. A. Endo, H. Hoshino, T. Suganuma, M. Moriya, T. Ariga, Y. Ueno, M. Nakano, T. Asayama, T. Abe, H. Komori, G. Soumagne, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE, 6517 (2007) 65170O.

5. 5. H. Mizoguchi, T. Abe, Y. Watanabe, T. Ishihara, T. Ohta, T. Hori, T. Yanagida, H. Nagano, T. Yabu, S. Nagai, G. Soumagne, A. Kurosu, K. M. Nowak, T. Suganuma, M. Moriya, K. Kakizaki, A. Sumitani, H. Kameda, H. Nakarai, and J. Fujimoto, Proc. SPIE, 7969 (2011) 796908.

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