Fabrication of Nickel Plasma Etching Mask by Nano-Imprint Lithography and Electroless Plating
Author:
Affiliation:
1. Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Link
https://www.jstage.jst.go.jp/article/photopolymer/33/5/33_551/_pdf
Reference22 articles.
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