Author:
Horibe Hideo,Yamamoto Masashi,Ichikawa Tomokazu,Kamimura Tomosumi,Tagawa Seiichi
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference8 articles.
1. 1) Gardner, W. L.; Baddorf, A. P.; Holber, W. M., J. Vac. Sci. Technol., 1997, A15(3), 1409-1412.
2. Effect of Gas Addition on Ozone Ashing
3. 3) Huynh, C. K., Mitchener, J. C., J. Vac. Sci. Technol, 1991, B9 (2), 353-356.
4. 4) DeGendt, S., Snee, P., Cornelissen, I., Lux, M., Vos, R., Mertens, P. W., Knotter, D. M., Meuris, M., Heyns, M., Solid State Phenomena, 1998, 65/66, 165-168.
5. 5) Wolke, K., Riedel, T., Haug, R., De Gendt, S., Heyns, M. M., Meuris, M., In Proc.of Electrochem. Soc. PV, 1999; pp 204-211.
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