Readying Directed Self-Assembly for Patterning in Semi-Conductor Manufacturing-Reference-Cited by-同舟云学术

Readying Directed Self-Assembly for Patterning in Semi-Conductor Manufacturing

Published:2013 Issue:6 Volume:26 Page:779-791
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Gronheid Roel,Delgadillo Paulina Rincon,Singh Arjun,Younkin Todd R.,Suyan Safak,Chan Boon Teik,Van Look Lieve,Bekaert Joost,Pollentir Ivan,Nealey Paul F.

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

https://www.jstage.jst.go.jp/article/photopolymer/26/6/26_779/_pdf

Reference37 articles.

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