Author:
SAITO SATOSHI,KIHARA NAOKO,NAITO TAKUYA,NAKASE MAKOTO,NAKASUGI TETSURO,KATO YOSHIMITSU
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Cited by
6 articles.
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1. Lithographic Resists;Encyclopedia of Polymer Science and Technology;2012-11-16
2. Lithographic Resists;Kirk-Othmer Encyclopedia of Chemical Technology;2005-06-17
3. Novel electron beam resist material using hydrophilic protecting group;Microelectronic Engineering;2005-03
4. A Development of Photoresist Material for Low Energy Electron Beam Lithography;Journal of Photopolymer Science and Technology;2003
5. Lithographic Resists;Encyclopedia of Polymer Science and Technology;2002-07-15